Solar Cell Vacuum Plasma Surface Treatment Equipment
Advanced plasma surface treatment equipment specifically designed for the new energy industry, enhancing solar cell performance through precision surface modification.
Product Overview
Plasma represents the fourth state of matter, following solid, liquid, and gas. Our non-thermal cold plasma technology effectively modifies textile surfaces while preserving bulk material characteristics. The plasma interaction produces four primary effects: cross-linking, etching, functionalization, and surface deposition.
This compact vacuum plasma cleaning machine utilizes inductive coupling technology and excels in insulating microwave tubes and components. Ideal for handling sensitive products requiring high cleanliness levels, it processes various materials including plastics, biochemical materials, PDMS, glass, metal semiconductors, ceramics, composites, and polymers. Benefits include superior surface cleaning, sterilization, enhanced wettability, surface property modification, and improved binding force.
Key Features
- Optimized for small-scale production and scientific research applications
- Compact design with easy operation and maintenance
- German core plasma technology for reliable performance
- Corrosion-resistant imported 316 stainless steel construction
- Precision flow control with imported needle valves
- Dual-process reactant gas channels
- Customization available for specific requirements
Technical Specifications
| Parameter | Specification |
|---|
| Vacuum Degree | 30Pa-100Pa |
| Gas Flow | 0-100ml/s |
| Cleaning Time | Adjustable (1-9999s) |
| Cooling Mode | Air Cooling |
| Gas Channels | Two-way working gas (Argon, hydrogen, oxygen, nitrogen, air, etc.) |
| Control Systems | PLC + Touch Screen |
| Vacuum Cavity Temperature | <50 ℃ |
| Vacuum Pump | Oil pump/dry pump (optional) |
| Power Supply | AC220V(±10V) |
| Remarks | Custom equipment available for different material forms, sizes and production capacities |
Equipment Components
- Reaction Chamber: Comprising vacuum chamber and electrodes, providing plasma reaction space for processing items
- Vacuum System: Includes vacuum gauge, vacuum pump, and piping to maintain optimal vacuum conditions
- Discharge System: Supplies energy to excite reaction gas ionization and generate required plasma
- Electronic Control System: Controls equipment processes according to optimal parameters and maintains stability
- Intake Flow Control System: Features flow meters and solenoid valves for precise gas flow regulation
Operation Procedure
- Open vacuum chamber door and place items for processing
- Close chamber door and activate main power switch
- Set parameters via touch screen interface
- Equipment automatically executes process sequence (vacuum → air intake → discharge → empty)
- Buzzer signals completion; remove processed items

Plasma Cleaning Principles
Plasma, recognized as the fourth state of matter, utilizes high-energy particles to create physical and chemical reactions on material surfaces. This enables surface activation, etching, decontamination, and modification of surface properties including friction coefficient, adhesion, and hydrophilicity.
Cleaning Effects: Plasma cleaning technology employs low-temperature plasma characteristics to chemically and physically clean material surfaces, enhancing smoothness, implanting new chemical functional groups, and enabling precise etching.
Plasma Cleaning Process

Advantages
- Environmentally friendly alternative to traditional wet cleaning (VOC-free)
- Low operational costs using gas as reaction medium
- Broad application range across diverse materials
- High cleaning efficiency with automation capabilities
- Enhanced surface performance and adhesive properties
Performance Comparison
Contact angle measurement determines surface wettability: θ<90° indicates hydrophilic surface (better wettability with smaller angles), while θ>90° indicates hydrophobic surface.

Dyne value measurement assesses bonding capability in printing, coating, laminating, and welding applications. Higher dyne values indicate superior bonding performance.

Common Applications
- Surface modification of polymer materials for improved bonding
- Oxide residue removal from electronic components
- Organic contaminant elimination from glass substrates
- Oil removal from metal surfaces
- Graphene and powder cleaning modification
- PDMS surface activated bonding
Quality Assurance & Service
Comprehensive 1-year warranty with technical support throughout. Equipment delivery includes complete technical documentation covering operation, commissioning, and maintenance. Remote training provided for normal operation, repair, maintenance, and emergency procedures. Full after-sales technical service and warranty documentation provided upon delivery.